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Scheme of the Monte Carlo simulation.
(a) Exposure of 75 keV electron beam.
(b) Initial distribution of protons
(green) and counter anions (red).
(c) Latent image formed by proton
migration during
the acid formation process. The
mesh was a 1 nm cube. (d) Initial
distribution of acids before PEB.
(e) Latent image formed by acid diffusion after PEB. (f) Final latent image
formed by proton migration (green)
and acid diffusion after PEB (blue).
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(a) Correlation between line width
and line edge roughness of a latent
image for each exposure dose after
PEB. (b) through (d) represent the
3D latent image at the minimum LER
point for each exposure dose.
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